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WebSmart-Cut® is a recently established, advanced technology for fabricating high-quality silicon-on-insulator (SOI) systems and has found many other successful applications. It meets almost all the high requirements for processing and manufacturing SOI wafers, which provide the basis of ultra-large-scale integration device structures of modern ... WebJan 17, 2009 · The Smart Cut TM technology, a well established method for . large scale SOI wafer fabrication (Fig. 1), was used to . transfer the single crystalline layers of X-Cut LiNbO 3. Full . WebA high volume technology for forming Silicon-on Insulator (SOI) named Smart-Cut(R) is described. Its key feature is a hydrogen implant which irreversibly weakens the structure … fly to meteor